Preparation and Characterization of Lithium Tantalate Thin Films using a High-concentration Precursor Solution

ISSN: 0973-7510

E-ISSN: 2581-690X

Jun Wang, Ming Yang, Jun Gou, Zehua Huang and Yadong Jiang

¹State Key Lab of Electronic Thin Films and Integrated Devices, School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu – 610 054 P. R. China.

J Pure Appl Microbiol. 2013;7(Spl. Edn.: November):759-764

Received: 27/09/2013 | Accepted: 04/11/2013 | Published: 30/11/2013

Abstract

An improved method of preparing lithium tantalate (LiTaO₃) precursor solution has been developed using 1,2-Propylene glycol solution instead of 2-methoxy ethanol. The LiTaO₃ film thickness produced by each coating process was about 110nm after annealing at 700^oC, which is much thicker than that produced by the normal method (25nm). Using the improved method, the preferred orientation of the film was (012) and the size of a typical crystallite was about 15nm. Studies of the surface morphologies of the fabricated LiTaO₃ film showed little surface roughness and high uniformity. The dielectric constant and dielectric loss factor of the annealed film were 45 and 0.006 at high frequency, respectively.

Keywords

Lithium tantalate thin film, Sol-gel method, high-concentration precursor solution, detectors, Dielectric constant

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