An improved method of preparing lithium tantalate (LiTaO3) precursor solution has been developed using 1,2-Propylene glycol solution instead of 2-methoxy ethanol. The LiTaO3 film thickness produced by each coating process was about 110nm after annealing at 700oC, which is much thicker than that produced by the normal method (25nm). Using the improved method, the preferred orientation of the film was (012) and the size of a typical crystallite was about 15nm. Studies of the surface morphologies of the fabricated LiTaO3 film showed little surface roughness and high uniformity. The dielectric constant and dielectric loss factor of the annealed film were 45 and 0.006 at high frequency, respectively.
Lithium tantalate thin film, Sol-gel method, high-concentration precursor solution, detectors, Dielectric constant
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